Hardness Indenter
A hardness indenter is available for harness measurements to the
researcher doing work at MIBL. It is a new system that is computer
controlled with the capability of automatic measurments.
Vacuum Furnace
A vacuum furnace provides heat treating and annealing capability in
this cryopumped sys-tem. Samples are placed in a 6 cm diameter, 65 cm long
quartz tube which is evacuated with a sorption pump and cryopump combination.
The tube is inserted into a tube furnace (mounted on a track) by rolling
the tube furnace over the quartz tube to position the samples in the center
of the hot zone. The maximum temperature attainable in this system is 1100°C
at 10 -8 Torr.
Thermal Imager
The thermal Imager (the Stinger) - manufactured by Ircon Inc. is capable of delivering amazing temperature details
of the surface of the samples during irradiations. The imager's range is from room temperature to 13000 C
and the surface resolution is in the micron range for its distance (10 inches) from the samples.
Below is shown a view from the Stinger of the irradiated surface.
Profilometer
The Dektak3 is a precision profilometer which operates in a Microsoft
Windows environment and is routinely used to measure film thickness, surface
roughness, and substrate curvature. All measurements are made electromechanically
by moving the specimen beneath a diamond-tipped stylus. The stylus tracking
force is adjustable within the range of 0.1 mN to 0.4 mN. The vertical
range of the instrument is from 10nm to 66um, with a vertical resolution
of 1nm. The horizontal resolution is a function of the selected scan length
and scan speed. The high-precision stage moves a specimen beneath the stylus
according to a user-programmed scan length and speed. Scan programs may
be stored on the hard drive for later use
Residual Stress Measurement System
The scanning laser reflection system is used for thin film residual
stress measurement. It consists of a 5 mW He-Ne laser, optical components
to guide the laser beam, a DC motor driven sample stage, and an X-Y optical
position detector. Both sample stage motion control and data acquisition
are achieved via a PC compatible computer using custom software. This
technique provides rapid analysis of film
stresses without contact of the film or substrate.
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