The Michigan Nanofabrication Facility (MNF)
at the Solid-State Electronics Laboratory
University of Michigan, Ann Arbor, Michigan 48109-2122

The Michigan Nanofabrication Facility (MNF) at the University of Michigan Solid-State Electronics Laboratory (SSEL) is part of the National Nanotechnology Infrastructure Network (NNIN). The Solid-State Electronics Laboratory is among the top research laboratories in microelectronics, micromechanics, optoelectronics, and micro and nano technologies based on silicon, compound semiconductor, and organic materials.  The MNF offers a complete laboratory for the fabrication of: nanofabricated semiconductor and polymer electronic and optoelectronic devices and circuits, micromachined sensors, actuators and microsystems (MEMS), and analog and digital integrated circuits. The facility consists of a Class 100/10 research laboratory available 24/7 with approximately 6,000 square feet of work area backed up by almost 25,000 square feet of support facilities. The MNF provides dedicated areas for:

• Silicon lithography/diffusion
• Silicon LPCVD
• Gallium arsenide devices
• Thin-film deposition
• Plasma dry etching
• Lithography (e-beam, contact and stepper)

The MNF has in-house characterization ability (SEM, spectroscopic ellipsometry, Hall, AFM and profilometry). Additionally, associated laboratories can provide XPS, Auger, TEM, X-Ray diffraction, X-ray reflectometry, Rutherford Backscatter Spectrometry, Nuclear Reaction Analysis and Elastic Recoil Detection.

What we provide:

• Quick access and start up
• Full time staff for tool support and training/mentoring of new users
• Users only pay for lab usage (no charge for training or technical support)
• IP belongs to the user

MNF Access Fees:

• Academic User: $1,300/month Silicon Area, $900/month Compound Semiconductor Area
• Non-Academic users: $70/hour (cap of $7,000) per month (main cleanroom)

For more information and access, contact:
Dr Sandrine Martin
User Manager
(734)-763-6719
sandrine@eecs.umich.edu
http://www.eecs.umich.edu/ssel/