The production of micro-scale reactors presents many chemical engineering challenges. I am researching ways to fabricate miniature components like pumps and pipes using semiconductor fabrication techniques. I also study new methods of thin film deposition.

     Biochip microarrays are effective genomic sequence decoding devices useful for an broad range of applications. Thus, the development of fabrication technologies towards biochips with improved quality, general adaptability, and reduced cost is of fundamental importance.

     We use normal integrated circuit fabrication processes (photolithography, thin film deposition, etching) with microelectromechanical systems (MEMS) technology such as deep etching and bonding to produce a wide variety of biochips. Examples include microwells and microfluidic devices (figure 1) . We do parallel synthesis of biochips based on an integrated method involving the use of photogenerated acid solution and digital photolithography (figure 2).

Our DNA chip synthesis was accomplished using conventional DNA phosphoramidite monomers, regular automated DNA synthesizers, and a projection display unit. We have succeeded in using our chip to detect single base-pair mismatches (figure 3). In addition, we extend our approach to other applications such as combinatorial chemistry and Cu binding sensor.

Figure1: an example of microfluidic devices.

Figure 2: a parallel synthesis method of oligo-DNA.

Figure 3: a mismatch detection.