Burns Research Group
Microfluidics at the University of Michigan
Burns Research Group
Dept of Chemical Engineering
3212 H.H. Dow Bldg
2300 Hayward Street
Ann Arbor, MI 48109-2136
The Burns research group has several primary labs where hard work, engineering and science come together in often fantastic results. We have access to most notably the Chemical Engineering cleanroom for glass, SU-8 and PDMS processing. There is a dicing saw room that allows for post-processing devices and performing other light-manufacturing capabilities. In addition, we have a standard wet chemistry laboratory and a comfortable graduate student office. We also make use of the College of Engineering's Lurie Nanofabrication Facility (LNF), a member of the National Nanotechnology Infrastructure Network (NNIN).
- Chemical Engineering Cleanroom
- Laboratory
- Dicing Saw Room
- Graduate Student Office
- Lurie Nanofabrication Facility
Chemical Engineering Cleanroom
The Chemical Engineering cleanroom or a class 1000 cleanroom located on the 3rd floor of the H.H. Dow building. The cleanroom includes capabilities to process SU-8, glass and poly(dimethylsiloxane). Specific equipment is detailed below.
- E-Beam Evaporator (Gold/Chromium/Oxide/Titanium)
- Mask Aligner
- Photoresist and SU8 Spinners
- Gold and Aluminum Wire Bonders
- Parylene Coater
- Surface Profilometer
- Acid, Base, Solvent and Photoresist Fume Hoods
- Oxygen/Argon Plasma Reactive Ion Etcher
- Heated Hydraulic Press
Relevant Contact: Brian Johnson (brianj at umich)
Laboratory (3005/3013)
This is the main laboratory where devices are tested. The main highlights include: two stereoscope setups (with added fluorescent lamps) with complimentary computers for electronically controlling pressure input to devices via solenoid valve array, video capture devices including high-speed camera (120 fps), bright-field/dark-field objective microscope with complementary data aquisition equipment, fluorescent microscope for biological experiments, an electrochemical drilling station, electrophoresis (gel and capillary) setups, a DI Water source and a multitude of vaccuum and pressure connections.
Dicing Saw Room
This room houses a dicing saw which is equipped with a diamond blade to dice silicon and glass wafers. In addition there is a laminater, soldering irons, drills, circular saws and other various pieces of equipment to help group members quickly and efficiently complete research.
Graduate Student Office
The recently renovated graduate student office has four computing workstations for device design, video processing and moderate computer simulations. In addition, the office has seating room for up to 10 students.